Vacuum maintaining device for green ceramic film in electronic module mfr.

摘要

The device has a vacuum feed-in, a vacuum passing support plate (2) and a porous cover. The cover is made of an open pore shaped body of stable shape, made of organic material. The organic material is preferably a sintered plastic e.g. a sinter polyethylene. The cover of organic open pore material may also be coated with a filter gauze.