| 摘要 |
PROBLEM TO BE SOLVED: To provide a support structure for a micro-mechanical device excellent in mechanical strength. SOLUTION: A support pillar 408 to be used together with a micro-mechanical device, particularly a digital micro-mirror device, is supported by a substrate 400, and it contains a pillar material covered by a metal layer 406. The pillar material is deposited on the substrate 400, the pillar material is patterned to define the support pillar 408, and the metal layer 406 is deposited to cover and surround the support pillar 408. A spacer layer 410 is provided to cover the pillar 408, and a flat surface made flush with the upper end of the pillar 408 is obtained. After the spacer layer 410 is provided, the spacer layer 410 is etched to expose the upper section of the pillar 408.
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