发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR PACKAGE
摘要 PURPOSE: To prevent the position deviation of a sealing material set onto a first film when manufacturing a semiconductor package using a pair of films. CONSTITUTION: A semiconductor device 13 and a sealing material 11 are set onto a mold 2 via a first film 21, a second film 22 covers them, the mold 1 is closed, and then the sealing material 11 between both films 21 and 22 is pressurized and heated to inject the sealing material 11 into a cavity, thus sealing a semiconductor device 13. A suction hole (sucking means) 5a is provided in advance at a plunger 5 provided at a pot part 4 of the mold 2 and the first film 21 on the pot part 4 is sucked onto the surface of the port part externally via the suction hole 5a when setting the sealing material 11 onto the mold 2 via the first film 21 and the sealing material 11 is set onto the same pot part 4 in that state.
申请公布号 JPH08241901(A) 申请公布日期 1996.09.17
申请号 JP19950043779 申请日期 1995.03.03
申请人 NITTO DENKO CORP 发明人 HOTTA YUJI;SHIGYO HITOMI;OIZUMI SHINICHI
分类号 B29C45/26;B29C45/02;B29C45/14;B29L31/34;H01L21/56;(IPC1-7):H01L21/56 主分类号 B29C45/26
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