发明名称 |
Optical processing furnace with quartz muffle and diffuser plate |
摘要 |
An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.
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申请公布号 |
US5577157(A) |
申请公布日期 |
1996.11.19 |
申请号 |
US19950462752 |
申请日期 |
1995.06.05 |
申请人 |
MIDWEST RESEARCH INSTITUTE |
发明人 |
SOPORI, BHUSHAN L. |
分类号 |
H05B3/00;H05B3/44;(IPC1-7):H05B1/02;H01L21/205 |
主分类号 |
H05B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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