| 摘要 |
PROBLEM TO BE SOLVED: To provided an X-ray generating device which can serve with stable performance for a long period of time. SOLUTION: An X-ray generating device concerned is structured so that an exciting energy beam 204 is applied on a target member 203 placed in a executed vacuum vessel for production of plasma 205 wherefore X-rays are taken out, wherein particles may be emitted and sputtered from the target member 203 or plasma 205. Adjacent to or close to this target member 203, a sputtering particle control member is installed having such a shape as controlling the direction distribution of the emitted amount of the sputtering particle and reducing the particle emission amount in the direction in which X-rays are taken out. The shaped part is made as a through hole of 0.1-5mm in diameter perpendicularly penetrating the surface of the particle controlling member 201, which is arranged so that the energy beam 204 penetrates the hole and is irradiate the target member 203. |
