| 摘要 |
<p>A processing system (10) includes an interface apparatus (12) for handling workpiece cassettes (16) for holding a plurality of semiconductor workpieces (W). The interface apparatus (12) includes a workpiece turnstile (40, 41) which pivots. The turnstile (40, 41) may be mounted on an elevator (42) for vertical movement. The turnstiles (40, 41) may have two saddles (45, 46) which hold cassette supports (47, 48) which hold the workpiece cassettes (16) thereon. The saddles (45, 46) can move to reorient the workpieces held in the cassettes between horizontal and vertical orientations.</p> |
