| 摘要 |
PROBLEM TO BE SOLVED: To provide high heat resistance, high gas transmission speed and high gas separation performance by forming a porous substrate of at least two layers having pores of specified small diameters and large diameters respectively and also forming a porous silica membrane of specified pore diameter as a separating membrane on the small pore diameter side of the porous substrate. SOLUTION: A porous substrate of a gas separation device has a two-layer structure formed of a surface layer 3 with pores of diameters 10-400Åand an inner layer 4 with pores of diameters of 400-100000Å. A porous silica membrane 5 of pore diameters of 2-10Åas a separating membrane formed by using polysilazane solution provided with the frame work of specified structure is formed on the layer 4 on the small pore diameter side of the porous substrate. The molecule screening action of the silica membrane is utilized sufficiently for the separating membrane thus formed. Thereby, the separation device provided with the high heat resistance, high hydrogen permeation speed and high gas separating power (particularly hydrogen selectivity) can be obtained arrangement.
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