发明名称 QUARTZ CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide the quartz crucible by which the influence of bubbles contained in the crucible is eliminated and the conversion of a dislocation-free silicon single crystal into a dislocation-containing silicon single crystal is not caused even at the time of performing a silicon single crystal pulling-up operation over a long period of time. SOLUTION: This quartz crucible has the following characteristics: (1) the diameter of bubbles contained in an inner surface layer of the quartz crucible, which layer has a >=1 mm thickness from the inner surface of the crucible, is <=20μm and also, the total bubble volume percentage in the inner surface layer is <=0.01%, or preferably, <0.001%; and further, (2) in the bottom or corner part of the quartz crucible, the diameter of bubbles contained in an inner surface layer of that part of the crucible, which layer has a >=1 mm thickness from the inner surface of the part, is <=20μm and also, the total bubble volume percentage in this inner surface layer is <=0.01%, or preferably, <=0.001%.
申请公布号 JPH1149597(A) 申请公布日期 1999.02.23
申请号 JP19970207444 申请日期 1997.08.01
申请人 SUMITOMO METAL IND LTD 发明人 KUSUNOKI KAZUHIKO;ARAHORI TADAHISA
分类号 C30B15/10;C30B29/06;H01L21/208;(IPC1-7):C30B29/06 主分类号 C30B15/10
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