| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a linear motor which does not deliver uneven speed during constant speed moving and is suitable for scan stage devices, by forming a parallel coil so that component coils are almost equal in the magnitude of counter-electromotive force which is produced when magnets and the parallel coil are relatively moved. SOLUTION: Four coils of coil-a to coil-d are connected in parallel, and coaxially laminated to form a parallel coil 4, and a plurality of such parallel coils are placed in line in the direction of the drive of a linear motor to obtain a stator. The number of turns of the coil-a to coil-d close to magnets is made smaller than the number of turns of the coil-b to coil-c in the center, so that the counter-electromotive force produced in the component coils when the parallel-connected coils are relatively moved in magnetic fields. The number of turns of each coil is made inversely proportional to the magnetic flux density of the magnet opposed thereto. As a result, the counter-electromotive forces Ia, Ic, Id produced in the component coils are almost equal, and counter one another, so that the counter-electromotive force passed through the parallel coils 4 can be reduced.</p> |
