| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately measure the resistance value of a resistant element being arranged in a matrix by eliminating the influence of a voltage drop caused by wiring resistance. SOLUTION: In a resistance-measuring device that measures the resistance of m×n resistant elements being wired in a matrix by m column wires (m indicates a positive integer) and n row wires (n indicates a positive integer), a probe needle 4042 is brought into contact with column wiring 4021 and row wiring 4022 at both the end parts of column wiring 4021 and row wiring 4022 and at least one part between both the end parts, a column-direction signal wire group 4041 and a row-direction signal wire group 4042 where signal wires from the probe needle are short-circuited for each of column and row wires are formed, each of the column-direction signal wire group 4041 is grounded via a shunt resistor 4034, each of the row-direction signal wire group 4042 is successively selected for applying a specific voltage Vs by an application pattern switching circuit 4031, voltage at the probe needle being connected to the column and row wires corresponding to the voltage application is measured, and each resistance value of a plurality of resistant elements 4023 is calculated by the contact analysis equation based on the measured voltage value.</p> |
