发明名称 WIRE SAW
摘要 <p>PROBLEM TO BE SOLVED: To provide a wire saw for maintaining the orthogonal abutting state of a wire to respective rollers as much as possible, and moreover facilitating the winding of the wire even increasing a working pitch. SOLUTION: A wire W is made travelable orthogonally to working rollers between the rollers 3a and 3b, and orthogonally to guide rollers between the rollers 4a and 4b, and the wire W traveling between the rollers 4a and 4b is made tiltedly travelable so as to be slipped by one pitch Pw part of wire guide grooves 5 provided on the rollers 3a and 3b from the wire W traveling between the rollers 3a and 3b.</p>
申请公布号 JP2000108012(A) 申请公布日期 2000.04.18
申请号 JP19980281725 申请日期 1998.10.02
申请人 EBARA CORP 发明人 SASABE KENICHI
分类号 B24B27/06;H01L21/301;H01L21/304;(IPC1-7):B24B27/06 主分类号 B24B27/06
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