SUBSTRATE TRANSPORTING ARM

摘要

PROBLEM TO BE SOLVED: To provide an arm which can reliably suck and transport a warped liquid crystal glass substrate or the like within a cassette having substrates arranged therein with a small pitch therebetween. SOLUTION: A plurality of vacuum sucking parts 9 on a transportation arm 2 have each a vacuum suction hole 15 and a planar sheet material 10, each vacuum suction hole 15 is overlapped with a vacuum suction hole 11 made in the sheet material 10, the sheet material 10 is joined only in the vicinity of its central part onto the arm 2. As a result, even when a warped substrate is transported within a cassette having substrates arranged therein with a small pitch therebetween, the arm to be inserted into a narrow gap between the substrates within the cassette can be made thin and reliable substrate transportation can be realized without a vacuum sucking miss even for the warped substrate.