| 摘要 |
PROBLEM TO BE SOLVED: To enable analysis which suitably narrows down generation factors of an outward appearance defect by discriminating and outputting which of 1st to 3rd inspecting processes an outward appearance defect detected in the 3rd inspecting process is detected in for the 1st time. SOLUTION: An analysis unit which processes the inspection result of an inspecting device and outputs the result stores coordinate data of an outward appearance defect detected in a 1st or 2nd inspecting process for the 1st time and compares them with coordinate data of an outward appearance detect detected in the 3rd inspecting process. Then which of the 1st, 2nd, and 3rd inspecting processes the outward appearance detect is detected in for the 1st time is discriminated and outputted. For display, a bar graph is drawn by taking the number of foreign matters on a longitudinal axis 1096 and process names on a lateral axis 1095. The process names are arranged in order from the oldest one from the left. For the bar graph, the sticking processes A, B and C are painted in the same colors by the processes or meshed by layers 1100 to 1102 and the upper and lower lines of the parts are connected by lines. |
