| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid crystal display element production apparatus which is capable of producing liquid crystal display elements having an excellent display grade despite of use of a substrate comprising plastic, etc., and attains a chucking state that the points right above chuck holes are locally deformed according to the chucking force from the holes. SOLUTION: When the flexible substrate 1 is transported onto a stage 2 and is subjected to positioning, a selector valve 6 is operated and both of a first communicating passage 6 and a second communicating passage 8 are brought into a connecting state to a vacuum pump 4. As a result, the flexible substrate 1 is put into a state such that the chucking may act over the entire surface thereof through the full chuck holes 3 and 7 which the substrate is positioned in alignment to the center of the stage 2, by which the substrate is attracted and fixed. The changeover manipulation of the selector valve 6 is then carried out, by which the connecting state of the second communicating passage 8 to the vacuum pump 4 is interrupted while the connecting state of the vacuum pump 4 on the first passage 5 side is kept continued and the vacuum chucking force through the central side chuck hole 7 is released. Consequently, the central chuck is changed over to the fixation in the peripheral edge chucking state in which the vacuum chucking force acts only through the peripheral edge side chuck holes 3. Resist is thereafter applied on the surface of the flexible substrate 1 and the treatment with this device is completed. |
