| 摘要 |
PROBLEM TO BE SOLVED: To load/unload a plurality of cassettes by stopping once a transport vehicle at a fixed position by providing a plurality of transfer devices along the advancing direction of the transport vehicle, and making the transfer device to move forward and backward therealong. SOLUTION: A transport vehicle 1 travels along a specified route and stops at a specified position corresponding to transfer devices 3 and 4 provided in a stocker 2. When the transport vehicle 1 stops, an arm 8 of the transfer device 3 moves forward to unload a first cassette 5 from the transport vehicle 1 to the stocker 2. After the cassette 5 is held by the arm 8, the transfer device 3 moved backward while holding it. When the transfer device 3 unloads the cassette 5, the transfer devices 3 and 4 is moved by only a transfer distance of a cassette 7 to the traveling direction of the transport vehicle 1 by means of a driving device. After the completion of movement, the arm 8 of the transfer device 4 moves forward, to load the cassette 7 to the empty space of the transport vehicle 1. |
