| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a chuck device capable of chucking an insulative substrate. SOLUTION: A first and a second electrode 11, 12 are exposed and disposed on a base 10 having an insulated surface so that an insulative substrate is disposed in contact with or close to the first and second electrode surfaces. An electric field having a spatial change ratio is formed between the first and second electrodes 11, 12 and hence the substrate 7 is chucked to the chuck device 1 surface due to the gradient force. The gradient force value depends on the change ratio value of the electric field and hence a voltage is applied between the first and second electrodes 11, 12 enough to form an electric field of 1.0×106 V/m or more.</p> |
