METHOD AND DEVICE FOR PERFORMING SCANNING WITH LASER BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for high-efficiently performing scanning with a laser beam at a high speed at an area from an ultraviolet area to a far ultraviolet area. SOLUTION: Plural polygon mirrors 108 and 109 are superposed and rotated while the phase of each mirror constituting the mirrors 108 and 109 is deviated by one-numberth the of object, so that the radiation of the incident laser beam 104 to the upper and lower polygon mirrors can be switched so as to perform the radiation of the laser beam within the effective scanning time of each polygon mirror surface by an A/O modulator 105. And also the same effect can be obtained by using a resonance operating type mirror for performing scanning.