Micro bore hole generation method involves determining substrate position using interferometer; computer system processes position signal into table position

摘要

The method involves moving a substrate beneath writing optics (4) using an X-Y table (6), whereby the writing optics produce a spot from a light source (1), esp. a laser. The substrate position is determined using an interferometer (9,11) and a suitable computer system (16) processes the substrate position signal into an actual position for the table system, whereby pref. all bore hole co-ordinates and additional information, e.g. bore hole dia., are made available to the computer system