Production of a solid body having a microstructure comprises diffusing a material into a substrate region covered by a masking layer, removing the masking layer

摘要

Production of a solid body (1) having a microstructure comprises diffusing a material into a substrate region covered by a masking layer so that a drop in concentration of the material occurs from the edge of the masking layer into the substrate region covered by the masking layer. Process then comprises: removing the masking layer to expose the substrate region below; converting a layer of the substrate near to the exposed substrate region into a coating (9) with a corresponding layer thickness progression; reducing a partial region of the coating; and exposing the substrate region covered by a partial region and/or inserting a material in the substrate region through the coating. The masking layers are removed by covering the substrate regions laterally bordering the masking layer with an etching mask, and contacting the mask with an etching agent so that a layer of the substrate regions to be covered with the etching mask is converted into an etching mask material.