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发明名称
摘要
申请公布号	JP3194037(B2)	申请公布日期	2001.07.30
申请号	JP19970273294	申请日期	1997.09.22
申请人		发明人
分类号	B05D1/40;B05C11/08;B05D3/00;H01L21/304;H01L21/306;H01L21/31;H01L21/316;(IPC1-7):H01L21/306	主分类号	B05D1/40
代理机构		代理人
主权项
地址

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