| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum chuck made of cordierite that prevents peeling and cracks, and has a covering layer with excellent wear and abrasion resistance. SOLUTION: A vacuum chuck 40 for wafers is equipped with a base 41 that consists of ceramics using cordierite as a main constituent, and a covering layer 42 that is formed on the surface of a side for retaining the wafer of the base 41. The covering layer 42 has a structure where at least two layers having different materials are laminated. The outermost layer out of at least two layers is made of a ceramic with hardness that is higher than that of the base 41. Also, out of at least the two layers, a layer that is the closest to the base 41 is made of a metal or a ceramic having the coefficient of linear expansion between those of the ceramic of the outermost layer and the base 41.</p> |
