发明名称 |
Stage heater and method of manufacturing shaft |
摘要 |
A stage heater and a method of manufacturing a shaft capable of suppressing heat transfer from a heating substrate toward the shaft. The stage heater includes: a heating substrate made of aluminum or an alloy containing aluminum; and a shaft that is bonded to one surface of the heating substrate and supports the heating substrate. The shaft includes: a pipe made of a metal having a lower heat conductivity than a material of the heating substrate; and a bonding layer formed on a side of the pipe to be bonded to the heating substrate by accelerating a powder material of aluminum or a powder material of an alloy containing aluminum together with a gas and blowing the powder material while being maintained in a solid phase to the pipe so as to deposit thereon. |
申请公布号 |
US9524888(B2) |
申请公布日期 |
2016.12.20 |
申请号 |
US201113695647 |
申请日期 |
2011.04.19 |
申请人 |
NHK Spring Co., Ltd. |
发明人 |
Kayamoto Takashi;Hirano Satoshi |
分类号 |
H05B3/68;C23C16/00;H01L21/67;C23C16/458;H01L21/687 |
主分类号 |
H05B3/68 |
代理机构 |
Locke Lord LLP |
代理人 |
Locke Lord LLP ;Armstrong, IV James E.;DiCeglie, Jr. Nicholas J. |
主权项 |
1. A stage heater comprising:
a heating substrate made of aluminum or an alloy containing aluminum; and a shaft that is bonded to one surface of the heating substrate and supports the heating substrate, wherein the shaft includes a pipe made of a metal having a lower heat conductivity than a material of the heating substrate, and a bonding layer formed on a side of the pipe to be bonded to the heating substrate, the bonding layer being formed by accelerating a powder material of aluminum or a powder material of an alloy containing aluminum together with a gas and blowing the powder material while being maintained in a solid phase to the pipe so as to deposit thereon, wherein the bonding layer adheres tightly to the pipe by anchor effect, and wherein a thickness of the bonding layer along a longitudinal direction or along a radius direction where the bonding layer is bonded to the heating substrate is 50 to 5% of a thickness of the pipe. |
地址 |
Yokohama-shi JP |