METHOD AND APPARATUS FOR CORRECTING STRAIN OF PIEZOELECTRIC SCANNER

摘要

PROBLEM TO BE SOLVED: To correct the displacement strain of piezoelectric scanner by attaching a strain gage to a piezoelectric scanner and using signals from the strain gage as feedback signals in relation to a method and an apparatus for correcting the strain of the piezoelectric scanner. SOLUTION: The strain gage 10 is attached to a piezoelectric scanner 1A. The difference between an output displacement amount signal of the strain gage 10 and a displacement amount of a preliminarily set reference signal is obtained. The displacement strain of the piezoelectric scanner 1A is corrected by using the obtained difference signal as the feedback signal.