| 摘要 |
An oscillation gyro (1) including a stainless steel base member (4) which is a quadratic prism, wherein the base member (4) has through holes (10, 7) extending in the directions crossing at right angles at the upper and lower portions thereof respectively, and further includes slide plates (8, 9) constituting a parallel plate portion (2) and slide plates (10, 11) constituting a parallel plate portion (3). Preferably, a titanium film (13) is formed by sputtering on each of the outer side surfaces of the parallel plate portions (2, 3), and a thin PZT film (14) is formed on the entire outer surface of the titanium film (13). Pairs of electrode films (15, 16) of aluminum are formed on the respective thin PZT films (14) up and down. The respective electrode films (15, 16) have a thickness of several um and the same area. Pads (15b, 16b) are formed at the lower ends of the base member (4) serving as fixed ends, and are connected to extension portions (15a, 16a) extending from the electrode film (15). Lead wires (19) connected to the pads (15a, 16a) suppress a change in the rigidity of the parallel plate portions (2, 3) caused by the connection of lead wires.
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