发明名称 ELECTROMAGNETIC ACTUATOR APPARATUS, STAGE APPARATUS, ALIGNER AND DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide an electromagnetic actuator apparatus provided with a cooling apparatus wherein temperature rise of an electromagnetic actuator which is caused by heat generation of a coil is surely restrained irrespective of change of an operating condition, and superior relative movement of a stator and a moving segment is not hindered at all times. SOLUTION: The cooling apparatus 200 is provided with an inlet 111a and an outlet 111b which are disposed in a housing 111 of the stator 110, duct lines 221 and 222 interconnected with the inlet and the outlet, respectively, and a pressure reducing pump 240 for adjusting cooling medium on the inlet 111b side of the housing 111 to be at a negative pressure. At the outlet 111b of the housing 111, the cooling medium is adjusted to be at a negative pressure and circulates in the housing 111. Pressure is not applied to the housing 111 in any case, and expansion is not caused when change of pressure is generated. By increasing the adjusting width of negative pressure of the cooling medium, superior cooling with a lot of cooling medium is enabled.</p>
申请公布号 JP2002186242(A) 申请公布日期 2002.06.28
申请号 JP20000380244 申请日期 2000.12.14
申请人 NIKON CORP 发明人 KIKUCHI TOSHIHIDE;NOVAK W THOMAS
分类号 G03F7/20;H01L21/027;H01L21/68;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/02 主分类号 G03F7/20
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