APPARATUS FOR TESTING AIR FILTER FOR CLEAN ROOM AND TEST METHOD USING THE SAME

摘要

PURPOSE: An apparatus for testing an air filter for clean room and a test method using the same are provided to perform reliably a surface scanning process and repair or exchange the air filter for clean room, normally. CONSTITUTION: A scanning frame(140) is supported by a support bar(150) connected with a main body(200). A track(130) is formed in the scanning frame(140). A moving device(120) is installed on the track(130). The moving device(120) has a motor and a shaft to move a sampling probe(110). The sampling probe(110) is loaded on the track(130). An air filter for clean room is installed on a ceiling. The movement of the support bar(150) is controlled by a control portion(190) installed in the main body(200). The control portion(190) controls the operation of the moving device(120). A sampling tube(160) is used for connecting the sampling probe(110) with a particle counter(170). A caster(210) is installed at a lower end portion of the main body(200).