VESSEL FOR STORING PRECISION SUBSTRATE AND ITS PRESSER MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a presser member of a vessel for storing a precision substrate, which is suitable for reducing the amount of outgassing caused by the presser member when storing the precision substrate in a storing vessel and which is capable of stably pressholding the stored precision substrate, and to provide the vessel for storing the precision substrate using this. SOLUTION: In the presser member of the present invention, at least contact parts for pressholding the precision substrate and portions except for the contact parts are formed with different materials. In addition, in the presser member 1, a square frame 2, the contact parts 5 that are formed at a pair of installation parts 4 provided so as to project inward from each facing side 3, respectively, and second contact parts 11 that are formed at the projecting side edges further projected via a supporting part 10 are formed with thermoplastic elastomer. In addition, the contact parts 5 are provided with a V-shaped groove 6 where a slope for receiving a periphery of the precision substrate changes on the way, and elastic pieces 12 that are separated and protruded in the shape of the comb tooth, which, forming the second contact parts 11, are provided with a V-groove for pressurizing the periphery of the precision substrate.