| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measuring device formed by integrating a membrane heater stable even at a temperature of over 400 deg.C and a temperature sensor highly sensitive and stable even at a temperature of over 150 deg.C on a membrane thermally separated from a substrate, and a highly-sensitive, small-sized, portable and stable gas concentration measuring device using the temperature measuring device. SOLUTION: This temperature measuring device has a constitution wherein a semiconductor substrate is used as a temperature sensor chip of this temperature measuring device, and the membrane heater and a p-n junction diode as the temperature sensor are integrated on the membrane thermally separated from the substrate, and the temperature of the membrane Joule-heated by the membrane heater is determined from temperature dependency of a reverse direction saturation current Is of the p-n junction diode. |
