ACTIVE MATRIX SUBSTRATE AND MANUFACTURING METHOD FOR ACTIVE MATRIX SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an active matrix substrate having no defect by anode- oxidizing a signal conductor and its manufacturing method. SOLUTION: The signal conductor is formed with the source electrode of a metallic thin-film and anode-oxidized so as to be brought into contact with a silicon layer containing insular impurities. An active silicon layer is formed, and crystallized by a laser irradiation. A gate insulating film and a scanning line combining a gate electrode are formed. Since a plurality of insulating films are formed between the signal conductor and the scanning line, the defect due to a short circuit between the signal conductor and the scanning line can be prevented. Since the source electrode can be formed without forming a through-hole, there is no defective contact, and an active matrix type liquid- crystal display body conducting an excellent display can be manufactured.