COMPOSITE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a composite thin film with no interlaminar release by making interlaminar adhesive force between a resin thin film and a metal thin film to be sufficient. SOLUTION: In the composite thin film in which the resin thin film and the metal thin film are laminated, oxygen concentration in the neighborhood of the boundary between the resin thin film and the metal thin film is made higher than the oxygen concentration in the center of the thickness of the resin thin film. COPYRIGHT: (C)2003,JPO