ROUTE DETERMINING METHOD, DRAWING DEVICE, IMAGING DEVICE, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To determine easily a desired route passing through a plurality of drawing points. SOLUTION: The device for drawing a pattern on a semiconductor substrate has a head section for emitting a drawing electron beam and a computer for performing operations for the drawing. A program is prepared in advance for the computer to determine the route passing through a plurality of drawing points on the substrate. An area 6 is divided into a plurality of divisions according to the degree of concentration of drawing points 60, and the sequence to follow in passing through the divisions is determined by using a Hilbert curve generating algorithm. A route determining algorithm is applied to each division for the determination of a route in each division. The routes in the divisions are connected according to the sequence to pass through, and a route 74 is finalized. In this way, a pattern is efficiently drawn on the semiconductor substrate 9. COPYRIGHT: (C)2003,JPO