| 摘要 |
PROBLEM TO BE SOLVED: To enable two bodies distant from each other to be aligned very accurately with each other. SOLUTION: An alignment optical system composed of a light-radiating unit 6 and a position detection sensor unit 12 enables the alignment light source 13 of the light-radiating unit 6 to emit a laser beam as an alignment beam, and the laser beam projected from the light-radiating unit 6 is condensed and collimated by a collimation lens 14, which is separated into two beams by a beam splitter 15. The shape and the center of gravity of one of the two beams, separated by the beam splitter 15, are monitored with a position detecting sensor 16 provided inside the light-radiating unit 6, and the other alignment beam is monitored by a position detection sensor 18 provided inside the position detection sensor unit 12, so that the position of the light radiating unit 6 is detected, while being in a state with the shape change in the beam cancelled. COPYRIGHT: (C)2003,JPO |
