| 摘要 |
PROBLEM TO BE SOLVED: To provide an athermal resin optical waveguide device which is provided with all of such properties of low cost, easy manufacturing, heat resistance, low propagation loss and long-term reliability, and is eliminated in temperature dependence by using fluorinated polyimide for the substrate and by controlling the coefficient of linear thermal expansion of the substrate. SOLUTION: The athermal resin optical waveguide device having the temperature dependence of the transmission refractive index in the optical waveguide eliminated can be obtained by using a fluorinated polyimide substrate having 40 to 120 ppm/K coefficient of linear thermal expansion,≥300°C glass transition temperature and high light transmitting property. COPYRIGHT: (C)2004,JPO |
