摘要 |
A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiNbO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 0.1% to about 8% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (lambda,mu,theta), with angle lambda in a range from -20° to +20°, angle mu in a range from about -45° to about -10°, and angle theta in a range from about (-1.16lambda-1.5)° to (-1.16lambda+1.5)°, wherein one of angle lambda and theta is not equal to zero degrees. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.
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