| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyroscopic sensor having a structure for arranging primary and secondary electrodes, easily wrought and excellent in detection sensitivity, in the vibration gyroscopic sensor utilizing Coriolis force. <P>SOLUTION: The piezoelectric vibration gyroscopic sensor includes a tuning fork type vibrating body in which two prismatic arm parts and a bottom base part for supporting the lower edges of the arm parts are integrated, the primary electrodes formed on the prismatic arm parts, and IDTs (secondary electrodes) for elastic surface wave elements which are formed at the arm parts. On each of the two surfaces of the prismatic arm parts, which are disposed opposite each other, the primary electrode is disposed in parallel at a prescribed interval along a longitudinal axis, and the IDT for the elastic surface wave element is disposed between the primary electrodes at the lower edges of the prismatic arm parts. <P>COPYRIGHT: (C)2004,JPO |
