| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment device and a surface treatment method which inhibits a leakage current at an end part of a coaxial cable in ultra high-frequency power supply to an electrode having a large area, thereby uniformly generating plasma of a VHF zone (30 MHz to 300 MHz) between a pair of electrodes in a vacuum container with high reproducibility to ensure uniform plasma surface treatment with respect to substrates having as a large area as 1m × 1m. <P>SOLUTION: The balanced-to-unbalanced conversion device for high-frequency plasma generation, used in the plasma surface treatment device and method which treats, using plasma, a surface of a substrate 12 disposed at one of a pair of electrodes 2, 4 in a vacuum container 1 is configured so that a part of the balanced-to-unbalanced converting device 100 is inserted between power supply places 17a, 17b to the electrodes and a second coaxial cable 109a, and that a main part of the device 100 is installed on the atmosphere side. The present invention encompasses a plasma surface treatment device and method constituted of the balanced-to-unbalanced conversion device. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
