| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an illuminating optical system capable of uniformizing brightness on a surface to be irradiated by reducing the nonuniformity of illuminance distribution on the surface to be irradiated which may be generated when an asymmetrical optical system is used. <P>SOLUTION: The illuminating optical system, which illuminates a surface to be illuminated by light from the light source, is provided with: a 1st beam splitting means having a plurality of 1st fine optical elements one-dimensionally arrayed in a prescribed array direction and having approximately the same refractive force in the prescribed array direction and capable of splitting a light from a light source into a plurality of beams and constituted; and an illuminance irregularity reducing means for reducing illuminance irregularity on the surface to be illuminated. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
