发明名称 |
Method and system for determining dimensions of optically recognizable features |
摘要 |
A method and system for determining dimensions of optically recognizable features provides a low-cost and efficient high speed/high resolution measurement system for determining surface feature dimensions. Multiple imaging subsystems are arranged at predetermined differing angles above a surface under test. A scanning subsystem moves either the imaging subsystems or the surface under test and a processor coupled to the imaging subsystems determines the height of a surface feature by determining the deviations between the outputs of the imaging systems as an edge of the surface feature passes within the optical paths of the imaging subsystems.
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申请公布号 |
US6927864(B2) |
申请公布日期 |
2005.08.09 |
申请号 |
US20020212832 |
申请日期 |
2002.08.05 |
申请人 |
XYRATEX TECHNOLOGY LIMITED |
发明人 |
CLARK BRYAN KEVIN |
分类号 |
G01B11/06;(IPC1-7):G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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