Method of manufacturing a motor comprising a rare earth thick film magnet

摘要

The method of manufacturing rare earth thick film magnet comprising a step of forming an alloy layer of 30-100 mum thick having a general formula R_XB_YTM_Z on a substrate by a physical deposition process, and a step of heat-treating the alloy layer to form a thick film magnetic layer having R₂TM₁₄B phase as a main phase. In the general formula, R is at least one of rare earth elements, B is boron, TM is iron or its alloy partly substituted by cobalt. X is 0.1-0.2, Y is 0.05-0.2 and Z=1-X-Y. Further, the method of the present invention includes a step of laminating a plurality of alloy layers formed on a substrate together with the substrate. A motor comprising rare earth thick film magnet of the present invention is extremely small while obtaining high output.