发明名称 REPRODUCING METHOD FOR THIN SUBSTRATE FIXING JIG
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for chemically or physically removing at least the surface of a weak adhesive layer and reusing a plate when durable lifetime of the weak adhesive layer comes to an end. <P>SOLUTION: When durable lifetime of the weak adhesive layer 3 comes to the end, the weak adhesive layer 3 is dissolved with solution and the weak adhesive layer 3 is formed again. When lifetime of the weak adhesive layer 3 comes to the end, the surface of the weak adhesive layer 3 is physically polished and removed. Then, a weak adhesive layer 8 is formed again on a remaining weak adhesive layer 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005252101(A) 申请公布日期 2005.09.15
申请号 JP20040062750 申请日期 2004.03.05
申请人 SHIN ETSU POLYMER CO LTD 发明人 USHIGOE YOKO;KOMATSU HIROTO
分类号 H05K13/02 主分类号 H05K13/02
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