| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent stacking of stories of a building due to transport, to reduce the load applied to the air conditioning equipment, to heighten the effect of investment on the whole equipment, and also to prevent the space having low cleanliness from spreading all over a factory in a batch processing system. <P>SOLUTION: This production system includes: a plane transport system 20 for horizontally moving a container and transporting the same; a processing equipment 10 disposed in the periphery of the plane transport system 20; and a clean capsule 200 connecting the container and the processing equipment 10 with air tightness. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
