| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of a wiring member consisting of lamination, which solves a problem in productivity, and which is provided with a merit not existing in a conventional method. SOLUTION: A four-laminated layer substrate is produced by laminating a supporting substrate or a first metal layer, a first insulating layer, a second insulating layer, and a second metal layer for forming a wiring unit sequentially. The substrate is employed as a starting material. A method for forming the wiring members so as to have a predetermined configuration respectively, includes processes for: working the first metal layer so as to have a predetermined configuration by photo etching method; working the second metal layer so as to have a predetermined configuration by photo etching method; working the first insulating layer so as to have a predetermined configuration by photo etching method; and working the second insulating layer so as to have a predetermined configuration by photo etching method by integrating with the first insulating layer are effected. In this case, etching in the first insulating layer etching working process and the etching in the second insulating layer etching working process are effected under different conditions, respectively. COPYRIGHT: (C)2006,JPO&NCIPI
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