发明名称 |
Workpiece support, especially for vacuum coating, comprises workpiece holders rotated by rigid transmission elements that engage with a drive part and the workpiece holders at eccentric points |
摘要 |
Workpiece support comprises a rotary mount (3) and a drive part (20) that rotate about a drive axis (4) on a base frame (1) and workpiece holders (13) that rotate about holder axes parallel to the drive axis. The workpiece holders are rotated by rigid transmission elements (25) that engage with driven points on the drive part and with drive points on the workpiece holders, where the driven and drive points have the same eccentricity with respect to their axes. |
申请公布号 |
CH698143(B1) |
申请公布日期 |
2009.05.29 |
申请号 |
CH20060000122 |
申请日期 |
2006.01.25 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH |
发明人 |
ESSER STEFAN |
分类号 |
C23C14/50;C23C16/458 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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