3-Axis pulse operated linear motor

摘要

A pulse operated electromagnetic drive system is referred to as a pulse operated linear motor in the present invention. The pulse operated linear motor comprises a first movable element which is restrained to move only in a first direction by cooperating electromagnetically with a first stator, a second movable element located on the first movable element which is restrained to move individually only in a second direction perpendicular to the first direction by cooperating electromagnetically with a second stator but which moves together with the first movable element, and a third movable element located on the second movable element which is restrained to move only in a third direction perpendicular to the first and second directions by cooperating electromagnetically with a third stator but which moves together with the second movable element, whereby the third movable element can move to any position in a space defined by the motor.