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发明名称
VERFAHREN UND VORRICHTUNG ZUM HANDHABEN FLACHER, MEHRECKIGER, PLATTENFOERMIGER GEGENSTAENDE
摘要
申请公布号
DE2542047(A1)
申请公布日期
1976.04.08
申请号
DE19752542047
申请日期
1975.09.20
申请人
GCA CORP.
发明人
G. FLINT,ALAN
分类号
H01L21/027;B65G47/91;G03F7/004;G03F9/00;H01L21/683;(IPC1-7):B65G47/91
主分类号
H01L21/027
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代理人
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