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发明名称
DEPOSITION OF FILMS ON SUBSTRATES
摘要
申请公布号
GB2039678(A)
申请公布日期
1980.08.13
申请号
GB19790041291
申请日期
1979.11.29
申请人
HUGHES AIRCRAFT CO
发明人
分类号
G03F7/40;G03F7/004;G03F7/027;G03F7/038;G03F7/26;H01L21/027;H01L21/30;H05K1/09;H05K3/02;(IPC1-7):G03C1/68
主分类号
G03F7/40
代理机构
代理人
主权项
地址
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