| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer light irradiation device for desmear and a desmearing method which allow for execution of dry desmearing with high efficiency.SOLUTION: An excimer light irradiation device for desmear includes an UV emission lamp for irradiating a workpiece with vacuum UV, a support mechanism for supporting the workpiece, a light transmission window arranged between the workpiece and UV emission lamp, and transmitting the vacuum UV from the UV emission lamp, and a process gas supply mechanism for supplying a process gas containing oxygen between the workpiece and light transmission window. The excimer light irradiation device further includes a cooling mechanism for cooling the light transmission window, and a heating mechanism for heating the workpiece.SELECTED DRAWING: Figure 1 |
