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发明名称
摘要
申请公布号
JPS60776(B2)
申请公布日期
1985.01.10
申请号
JP19760090346
申请日期
1976.07.30
申请人
HITACHI LTD
发明人
IMAIZUMI ICHIRO
分类号
H01L21/8222;H01L21/76;H01L21/761;H01L27/04;H01L27/082
主分类号
H01L21/8222
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