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发明名称
DEVICE FOR PLASMA TREATMENT
摘要
申请公布号
JPS6074626(A)
申请公布日期
1985.04.26
申请号
JP19830182009
申请日期
1983.09.30
申请人
FUJITSU KK
发明人
KISA TOSHIMASA
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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