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发明名称
APPARATUS FOR TRANSFERRING SEMICONDUCTOR WAFERS
摘要
申请公布号
IL75207(D0)
申请公布日期
1985.09.29
申请号
IL19850075207
申请日期
1985.05.16
申请人
LESTER R. JOHNSON
发明人
分类号
B65G47/52;B23Q7/05;B65G1/00;B65G1/02;B65G61/00;H01L21/67;H01L21/677;(IPC1-7):H01L/
主分类号
B65G47/52
代理机构
代理人
主权项
地址
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